Highly-Sensitive and High-Resolution Three Dimensional Measurement in All Fiber System

Takefumi Ota; Norihiko Nishizawa

Conference on Lasers and Electro-Optics/Pacific Rim 2007
(Optica Publishing Group, 2007),
paper ThG2_5

Highly-Sensitive and High-Resolution Three Dimensional Measurement in All Fiber System

Takefumi Ota and Norihiko Nishizawa

Conference on Lasers and Electro-Optics/Pacific Rim 2007

Seoul Republic of Korea
ISBN: 1-4244-1174-2

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Optical Metrology II (ThG2)

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T. Ota and N. Nishizawa, "Highly-Sensitive and High-Resolution Three Dimensional Measurement in All Fiber System," in Conference on Lasers and Electro-Optics/Pacific Rim 2007, (Optica Publishing Group, 2007), paper ThG2_5.

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Abstract

Practical all fiber three dimensional measurement system is demonstrated. The sensitivity and axial resolution are as high as 85 dB and 2 μm. The high resolution images of metaric samples are clearly obtained from ~ a few meter long distance at the speed of 52 points/s.

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