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Optica Publishing Group
  • Conference on Lasers and Electro-Optics/Pacific Rim 2007
  • (Optica Publishing Group, 2007),
  • paper ThG1_5

Frequency comb based interference microscope with a line-type image sensor

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Abstract

We present a frequency comb based interferometry with a broadband comb light source and a line-type image sensor for profilometry and optical tomography. The cross-sectional images were captured by varying the frequency interval of 25 GHz without mechanical shift. The resolution in depth direction was 35 μm.

© 2007 IEEE

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