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Conferences > CLEOPR > 2007 > ThG1 > ThG1_1
  • Conference on Lasers and Electro-Optics/Pacific Rim 2007
  • (Optica Publishing Group, 2007),
  • paper ThG1_1

Displacement metrology with sub-nm accuracy in air using optical frequency comb

Y. Bitou, T. R. Schibli, and K. Minoshima

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Abstract

A laser-frequency-based displacement measurement system with sub-nanometer uncertainty using an optical frequency comb is developed. By using wide range of optical frequency measurement and dual Fabry-Perot cavity system, we achieved displacement ranges up to 10 μm with sub-nm uncertainty.

© 2007 IEEE

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