Abstract
The CVD system by 27.12 MHz ICP discharge and CO2 laser was developed to investigate the advanced ceramics, particularly diamond grain or film. Our system is unique, whose RF antenna coil was installed inside of chamber.
In our experiment, it was measured that the plasma characteristics which were Te=3.0 eV and ne=8.2×109 cm−3. Any impurity was not observed in the present condition, judging from the spectroscopic measurement. We concluded that the diamond nuclei or ball-like diamond on the silicon (Si) plate by the low power RF heating was synthesized.
© 2007 IEEE
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