Expand this Topic clickable element to expand a topic
Skip to content
Optica Publishing Group
  • Conference on Lasers and Electro-Optics/Pacific Rim 2007
  • (Optica Publishing Group, 2007),
  • paper ThE3_4

Study of Diamond Synthesis by Inductively Coupled Plasma with Inside RF Antenna and CO2 Laser

Not Accessible

Your library or personal account may give you access

Abstract

The CVD system by 27.12 MHz ICP discharge and CO2 laser was developed to investigate the advanced ceramics, particularly diamond grain or film. Our system is unique, whose RF antenna coil was installed inside of chamber.

In our experiment, it was measured that the plasma characteristics which were Te=3.0 eV and ne=8.2×109 cm−3. Any impurity was not observed in the present condition, judging from the spectroscopic measurement. We concluded that the diamond nuclei or ball-like diamond on the silicon (Si) plate by the low power RF heating was synthesized.

© 2007 IEEE

PDF Article
More Like This
Addition of Metals into RF Plasma for Diamond Synthesis

Masamitsu Nagano, Toshiharu Nagao, Takashi Urasaki, Hiroyuki Mishima, and Hiromichi Ichinose
DGGC365 Applications of Diamond Films and Related Materials (DFM) 1995

A Study on the Cl2/C2H4/Ar Plasma Etching of ITO Using Inductively Coupled Plasma

Rong Fang, Xia Guo, Wen Jing Jiang, Yu Han Guo, Yuan Qin, Guang Di Shen, and Jin Ru Han
ThG1 Asia Communications and Photonics Conference and Exhibition (ACP) 2009

Synthesis of Graphene Layers by Inductive Coupled Plasma Enhanced Chemical Vapor Deposition (ICP-CVD) for Application in Optoelectronics

Aye Aye Thant, Dae-Yool Jung, Jung-Yong Lee, and Sung-Yool Choi
PW2D.3 Photonics for Energy (PE) 2019

Select as filters


Select Topics Cancel
© Copyright 2024 | Optica Publishing Group. All Rights Reserved