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  • Conference on Lasers and Electro-Optics/Pacific Rim 2007
  • (Optica Publishing Group, 2007),
  • paper FF2_4

Advanced SIL System with High NA and Large Tolerance

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Abstract

To achieve high NA and large tolerance, we designed a new SIL system (Optimum SIL) which combines each advantages of the Hyper SIL and the Hemi SIL system. Also using micro-SIL system we can improve its performance. There are simulation results which support our works.

© 2007 IEEE

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