Woodpile Photonic Crystal Nanocavity in GaAs

Lingling Tang; Tomoyuki Yoshie

doi:10.1364/CLEO.2010.CWB3

Conference on Lasers and Electro-Optics 2010
OSA Technical Digest (CD) (Optica Publishing Group, 2010),
paper CWB3
•https://doi.org/10.1364/CLEO.2010.CWB3

Woodpile Photonic Crystal Nanocavity in GaAs

Lingling Tang and Tomoyuki Yoshie

Conference on Lasers and Electro-Optics 2010

San Jose, California United States
16–21 May 2010
ISBN: 978-1-55752-889-6

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Photonic Crystals II: Cavities (CWB)

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L. Tang and T. Yoshie, "Woodpile Photonic Crystal Nanocavity in GaAs," in Conference on Lasers and Electro-Optics 2010, OSA Technical Digest (CD) (Optica Publishing Group, 2010), paper CWB3.

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Abstract

High-precision three-dimensional woodpile photonic crystal nanocavities with 40 × 55 × 2.25 unit cells are fabricated in GaAs wafer for 1.55 µm wavelength with the two-directional etching method in a simple two-patterning process.

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