Abstract
Microsystems perform sophisticated tasks in miniaturized volumes. Shaping or analyzing light signals, mixing ultra-small volumes of chemicals, sensing mechanical signals, manipulating micro-objects, sequencing bio-molecules are common operations that can be done by these tiny machines. To further advance the field, there is a growing interest for integrated manufacturing platform where optics, fluid handling capabilities or micro-mechanical elements can be combined.
© 2010 Optical Society of America
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