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100 nm Metallic Checkerboard by Wafer-scale Nanoimprint and Its Application in Surface Enhanced Raman Spectroscopy

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Abstract

A wafer-scale (~4 inch) 100 nm nano-checkerboard structure was fabricated. The fabrication combines multiple nanoimprint lithography, 3-D patterning and self-aligned etching. Transmission/reflection resonance at ~750 nm and Raman enhancement of ~ 4.5×106 were achieved.

© 2010 Optical Society of America

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