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Optica Publishing Group
  • Conference on Lasers and Electro-Optics/International Quantum Electronics Conference
  • OSA Technical Digest (CD) (Optica Publishing Group, 2009),
  • paper CTuEE5
  • https://doi.org/10.1364/CLEO.2009.CTuEE5

The role of native and transient laser-induced defects in the femtosecond breakdown of dielectric films

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Abstract

Experiments and modeling reveal that the dielectric breakdown of hafnia films is controlled by laser induced and native defects under multiple femtosecond pulse exposure. Transient processes occur on a 100 ps and 10 ms timescale.

© 2009 Optical Society of America

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