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  • Conference on Lasers and Electro-Optics/International Quantum Electronics Conference
  • OSA Technical Digest (CD) (Optica Publishing Group, 2009),
  • paper CThG3
  • https://doi.org/10.1364/CLEO.2009.CThG3

Flow Monitoring in Optofluidic Channels Using Planar Bragg Gratings

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Abstract

An integrated pressure/flow sensor using a direct UV written planar Bragg grating situated inside a flexible diaphragm of thickness 200µm has been fabricated. The diaphragm is created by etching away the underlying silicon support.

© 2009 Optical Society of America

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