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Conferences > CLEO > 2009 > CThB > CThB4
  • Conference on Lasers and Electro-Optics/International Quantum Electronics Conference
  • OSA Technical Digest (CD) (Optica Publishing Group, 2009),
  • paper CThB4
  • •https://doi.org/10.1364/CLEO.2009.CThB4

Optimization of Metallic Micro-Heaters for Reconfigurable Silicon Photonics

Amir H. Atabaki, Mohammad Soltani, Siva Yegnanarayanan, Ali A. Eftekhar, and Ali Adibi

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Abstract

Integration of silicon microresonators with metallic micro heaters optimized for low power consumption and fast reconfigurability is experimentally demonstrated. It is shown that narrower heaters improve the performance and also LPCVD SiN over cladding enhances tuning speed.

© 2009 Optical Society of America

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