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  • Conference on Lasers and Electro-Optics/International Quantum Electronics Conference
  • OSA Technical Digest (CD) (Optica Publishing Group, 2009),
  • paper CMQQ4
  • https://doi.org/10.1364/CLEO.2009.CMQQ4

Phase Tunable Holographic Lithography Using a Single Optical Element

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Abstract

This paper presents the holographic fabrication of three-dimensional photonic crystal templates by forming a five beam interference pattern using a top-cut prism. The interconnecting of the multi-layer structures was controlled by phase-tuning one interfering beam.

© 2009 Optical Society of America

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