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Conferences > CLEO > 2008 > CWC > CWC5
  • Conference on Lasers and Electro-Optics/Quantum Electronics and Laser Science Conference and Photonic Applications Systems Technologies
  • OSA Technical Digest (CD) (Optica Publishing Group, 2008),
  • paper CWC5

Detection of Process-Dependent Changes in the Hf(1-x)SixO2/Si (100) Barrier Heights by Second Harmonic Generation

J. Price, Y. Q. An, and M. C. Downer

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Abstract

We measure barrier heights of silicon/high-k dielectric structures, and their changes with processing, by identifying a photon-energy-dependent threshold for internal hole photoemission using spectroscopic time-dependent second-harmonic generation.

© 2008 Optical Society of America

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