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  • Conference on Lasers and Electro-Optics/Quantum Electronics and Laser Science Conference and Photonic Applications Systems Technologies
  • OSA Technical Digest (CD) (Optica Publishing Group, 2008),
  • paper CThCC2

Digital Resonance Tuning of High-Q/Vm Silicon Photonic Crystal Nanocavities by Atomic Layer Deposition

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Abstract

We propose and demonstrate the digital resonance tuning of high-Q/Vm silicon photonic crystal nanocavities using self-limiting atomic layer deposition. Control of resonances of 122 ± 18 pm per hafnium oxide atomic layer is achieved.

© 2008 Optical Society of America

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