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Optica Publishing Group
  • Conference on Lasers and Electro-Optics/Quantum Electronics and Laser Science Conference and Photonic Applications Systems Technologies
  • OSA Technical Digest (CD) (Optica Publishing Group, 2008),
  • paper CMX1

Laser Precision Engineering From Microfabrication To Nanoprocessing

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Abstract

Laser precision engineering has unique advantages of non-contact process, flexible setup and high speed processing in air. In the last decades, we have witnessed its extensive applications in various production lines. Combined with other advanced processing tools, laser nanofabrication will play a much more important role in the next generation manufacturing.

© 2008 Optical Society of America

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