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  • Conference on Lasers and Electro-Optics/Quantum Electronics and Laser Science Conference and Photonic Applications Systems Technologies
  • OSA Technical Digest (CD) (Optica Publishing Group, 2008),
  • paper CMJJ7

MEMS Chemical Sensors Using Waveguide Fabry-Perot Microcavities

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Abstract

We demonstrate waveguide Fabry-Perot microcavities coupled to in-plane microbeam resonators. The microcavities enable measurement of mechanical resonant frequency shifts resulting from mass loading due to analyte sorption. High selectivity sensor arrays are possible.

© 2008 Optical Society of America

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