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  • Conference on Lasers and Electro-Optics/Quantum Electronics and Laser Science Conference and Photonic Applications Systems Technologies
  • OSA Technical Digest (CD) (Optica Publishing Group, 2008),
  • paper CMEE7

Remote and In-Situ Calibration of Linear Scale by Low-Coherence Tandem Interferometer

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Abstract

Technique of transferring length-information between two distantly-located low-coherence-interferometers through a single-mode-optical-fiber for remote and in-situ calibration of linear scale is developed. Results of 200 nm-deviation and 100 nm-standard deviation for 50 mm-length is preliminary achieved.

© 2008 Optical Society of America

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