Polysilicon-on-Insulator Photonic Devices

Kyle Preston; Michal Lipson

Conference on Lasers and Electro-Optics/Quantum Electronics and Laser Science Conference and Photonic Applications Systems Technologies
OSA Technical Digest Series (CD) (Optica Publishing Group, 2007),
paper CTuG2

Polysilicon-on-Insulator Photonic Devices

Kyle Preston and Michal Lipson

Conference on Lasers and Electro-Optics 2007

Baltimore, Maryland United States
6–11 May 2007
ISBN: 1557528349

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Nanophotonic Waveguide Technologies (CTuG)

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K. Preston and M. Lipson, "Polysilicon-on-Insulator Photonic Devices," in Conference on Lasers and Electro-Optics/Quantum Electronics and Laser Science Conference and Photonic Applications Systems Technologies, OSA Technical Digest Series (CD) (Optica Publishing Group, 2007), paper CTuG2.

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Abstract

We demonstrate ring resonators with Q = 4,000 using polycrystalline silicon annealed at a low temperature of 600°C, which is compatible with standard CMOS processes.

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