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  • Conference on Lasers and Electro-Optics/Quantum Electronics and Laser Science Conference and Photonic Applications Systems Technologies
  • OSA Technical Digest Series (CD) (Optica Publishing Group, 2007),
  • paper CTuG1

Efficient, Broadband and Compact Metal Grating Couplers for Silicon-on-Insulator Waveguides

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Abstract

Metal grating couplers for Silicon-on-Insulator waveguides are proposed. A silver grating coupler with 33% coupling efficiency is designed. A gold grating coupler prototype is fabricated using Focused Ion Beams demonstrating over 10% coupling efficiency.

© 2007 Optical Society of America

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