Abstract
This paper presents the design, fabrication and measurement results of a multi-axis electrothermal micromirror. This micromirror employs unique bimorph actuators to achieve one-dimensional piston motion and two-dimensional rotation.
© 2007 Optical Society of America
PDF ArticleMore Like This
Yingshun Xu, Janak Singh, Teo Hui Siang Jason, Kotlanka Ramakrishna, C. S. Premchandran, Chen Wei Sheng Kelvin, Chuah Tong Kuan, Nanguang Chen, Malini C. Olivo, and Colin J.R. Sheppard
6627_33 European Conference on Biomedical Optics (ECBO) 2007
Dooyoung Hah, Sophia Huang, Hung Nguyen, Hsin Chang, Ming C. Wu, and Hiroshi Toshiyoshi
TuO3 Optical Fiber Communication Conference (OFC) 2002
Huikai Xie, Ankur Jain, Tuqiang Xie, Yingtian Pan, and Gary K. Fedder
CTuW1 Conference on Lasers and Electro-Optics (CLEO:S&I) 2003