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Conferences > CLEO > 2007 > CThCC > CThCC5
  • Conference on Lasers and Electro-Optics/Quantum Electronics and Laser Science Conference and Photonic Applications Systems Technologies
  • OSA Technical Digest Series (CD) (Optica Publishing Group, 2007),
  • paper CThCC5

Transparent Thin-Film Characterization by Using Differential Optical Sectioning Interference Microscopy

Chun-Chieh Wang, Hong-Jhang Jian, and Chau-Hwang Lee

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Abstract

Differential optical sectioning interference microscopy is proposed for measuring the refractive index (n) and thickness (d) of transparent thin films with sub-micrometer lateral resolution. We demonstrate this technique with a 100-nm SiO2 layer on Si.

© 2007 Optical Society of America

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