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Conferences > CLEO > 2007 > CFR > CFR6
  • Conference on Lasers and Electro-Optics/Quantum Electronics and Laser Science Conference and Photonic Applications Systems Technologies
  • OSA Technical Digest Series (CD) (Optica Publishing Group, 2007),
  • paper CFR6

Effect of Pulse Shaping on Silicon Micromachining Monitored by Laser Induced Breakdown Spectroscopy and Surface Second Harmonic Generation

Tissa C. Gunaratne, Xin Zhu, Vadim Lozovoy, and Marcos Dantus

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Abstract

Pulse shaping on silicon micromachining is explored using laser induced breakdown spectroscopy and surface second harmonic generation as diagnostics. The morphology of ablated holes for different shaped pulses will be discussed.

© 2007 Optical Society of America

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