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Conferences > CLEO > 2006 > CFC > CFC6
  • Conference on Lasers and Electro-Optics/Quantum Electronics and Laser Science Conference and Photonic Applications Systems Technologies
  • Technical Digest (CD) (Optica Publishing Group, 2006),
  • paper CFC6

Micromechanical Resonators with Integrated Waveguides and Fabry-Perot Cavities

Marcel W. Pruessner, Todd H. Stievater, and William S. Rabinovich

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Abstract

Micromechanical resonators incorporating waveguide Fabry-Perot cavities are designed and losses affecting optical finesse are studied. A doubling of the effective Q-factor in a coupled-optical-mechanical resonator is obtained, enabling high-resolution resonant sensors with optical readout.

© 2006 Optical Society of America

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