Silicon Double Inversion of Polymeric Templates: A new Route towards Three-Dimensional Photonic Bandgap Materials

Georg von Freymann; Nicolas Tétreault; Geoffrey A. Ozin; Sajeev John; Fabian Perez-Willard; Markus Deubel; Martin Wegener

Conference on Lasers and Electro-Optics/Quantum Electronics and Laser Science and Photonic Applications Systems Technologies
Technical Digest (CD) (Optica Publishing Group, 2005),
paper CTuU6

Silicon Double Inversion of Polymeric Templates: A new Route towards Three-Dimensional Photonic Bandgap Materials

Georg von Freymann, Nicolas Tétreault, Geoffrey A. Ozin, Sajeev John, Fabian Perez-Willard, Markus Deubel, and Martin Wegener

Conference on Lasers and Electro-Optics 2005

Baltimore, Maryland United States
22–27 May 2005
ISBN: 1-55752-770-9

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3-D Photonic Crystals: Novel Fabrication (CTuU)

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G. von Freymann, N. Tétreault, G. A. Ozin, S. John, F. Perez-Willard, M. Deubel, and M. Wegener, "Silicon Double Inversion of Polymeric Templates: A new Route towards Three-Dimensional Photonic Bandgap Materials," in Conference on Lasers and Electro-Optics/Quantum Electronics and Laser Science and Photonic Applications Systems Technologies, Technical Digest (CD) (Optica Publishing Group, 2005), paper CTuU6.

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Abstract

We present the successful silicon double inversion of direct laser written polymer templates for three-dimensional (3D) Photonic Crystals. Combined with plasma pre-treatment it allows for the fabrication of 3D photonic bandgap materials for telecommunication wavelengths.

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