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  • Conference on Lasers and Electro-Optics/International Quantum Electronics Conference and Photonic Applications Systems Technologies
  • Technical Digest (CD) (Optica Publishing Group, 2004),
  • paper CTuM3

Fabrication of InGaAs quantum dots by metal organic chemical vapor deposition and selective area epitaxy

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Abstract

We have demonstrated the fabrication of uniform arrays of quantum dots by metal organic chemical vapor deposition using electron beam lithography and selective area epitaxy techniques. Photoluminescence data showing emission at 1250nm is presented.

© 2004 Optical Society of America

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