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Conferences > CLEO > 2004 > CThN > CThN5
  • Conference on Lasers and Electro-Optics/International Quantum Electronics Conference and Photonic Applications Systems Technologies
  • Technical Digest (CD) (Optica Publishing Group, 2004),
  • paper CThN5

Development of laser-terahertz emission microscope for inspecting the electrical faults in semiconductor devices

Masatsugu Yamashita, Toshihiko Kiwa, Masayoshi Tonouchi, and Kodo Kawase

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Abstract

We have developed a laser-terahertz emission microscope for inspecting the electrical faults in integrated circuits. By improving the spatial resolution of the system, we successfully observed the THz emission image in a microprocessor chip on standby.

© 2004 Optical Society of America

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