Growth of diamond-like films at room temperature on Si and III-V materials

Renato Bugge; Renato Bugge; Björn Ove Fimland

Conference on Lasers and Electro-Optics/International Quantum Electronics Conference and Photonic Applications Systems Technologies
Technical Digest (CD) (Optica Publishing Group, 2004),
paper CThAA7

Growth of diamond-like films at room temperature on Si and III-V materials

Renato Bugge and Björn Ove Fimland

Conference on Lasers and Electro-Optics 2004

San Francisco, California United States
16–21 May 2004
ISBN: 1-55752-770-9

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Unconventional Structured Materials (CThAA)

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R. Bugge and B. O. Fimland, "Growth of diamond-like films at room temperature on Si and III-V materials," in Conference on Lasers and Electro-Optics/International Quantum Electronics Conference and Photonic Applications Systems Technologies, Technical Digest (CD) (Optica Publishing Group, 2004), paper CThAA7.

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Abstract

A new method to grow diamond-like films was used on Si and in III-V optoelectronic components. Room temperature deposition of amorphous-like films with refractive index of 2.24 was done on and around AlGaAsSb waveguides.

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