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Conferences > CLEO > 2004 > CMY > CMY5
  • Conference on Lasers and Electro-Optics/International Quantum Electronics Conference and Photonic Applications Systems Technologies
  • Technical Digest (CD) (Optica Publishing Group, 2004),
  • paper CMY5

The role of the native oxide on silicon in femtosecond laser damage threshold studies at grazing incidence

Yoosuf N. Picard, Steven M. Yalisove, and Joel P. McDonald

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Abstract

Femtosecond laser ablation studies of silicon with and without the native oxide on the surface were conducted in an ultrahigh vacuum environment. SEM results show a clear difference in the laser intensity threshold for ablation.

© 2004 Optical Society of America

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