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Conferences > CLEO > 2004 > CMY > CMY1
  • Conference on Lasers and Electro-Optics/International Quantum Electronics Conference and Photonic Applications Systems Technologies
  • Technical Digest (CD) (Optica Publishing Group, 2004),
  • paper CMY1

Exploring the deterministic nature of femtosecond laser-induced optical breakdown and applications to nanomachining

Alan J. Hunt, Ajit Joglekar, Edgar Meyhöfer, Hsiao-hua Liu, and Gerard Mourou

Open Access Open Access

Abstract

The limits of nanoscale machining with sub-picosecond pulsed lasers are systematically characterized. We propose that the minimum scale is ultimately limited by the valence electron density, thus enabling highly reproducible machining at the nanometer scale.

© 2004 Optical Society of America

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