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Conferences > CLEO > 2003 > CTuW > CTuW5
  • Conference on Lasers and Electro-Optics/Quantum Electronics and Laser Science Conference
  • Technical Digest (Optica Publishing Group, 2003),
  • paper CTuW5

Photonic crystal slab waveguides fabricated by the combination of holography and microlithography

Chi-O Cho, Yeong-Geun Roh, Heonsu Jeon, Beom-Seok Lee, Hye-Won Kim, and Young-Ho Choe

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Abstract

We have fabricated air-bridge type of two-dimensional photonic crystal waveguides using two high-throughput processes: holography and micro-lithography. Despite the existence of misalignments, fabricated waveguides are comparable in performance to purely e-beam defined ones in literature.

© 2003 Optical Society of America

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