We report on UV light source of 257nm and 193nm using nonlinear wavelength conversion from 1547nm light emitted by an Er-doped fiber amplifier (EDFA). These light sources are based on sixth harmonic generation and a eighth harmonic generation of 1547nm light respectively. Average power of 800mW at 257nm light source and 140mW at 193nm light source were generated. Also we report the results of a durability test up to 100 hours for the 257nm light source.

© 2003 Optical Society of America

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