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Conferences > CLEO > 2003 > CThM > CThM12
  • Conference on Lasers and Electro-Optics/Quantum Electronics and Laser Science Conference
  • Technical Digest (Optica Publishing Group, 2003),
  • paper CThM12

Evaluation of complex optical constants of semiconductor wafers using terahertz ellipsometry

Takeshi Nagashima and Masanori Hangyo

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Abstract

We have developed terahertz ellipsometry by combining ellipsometry with time domain spectroscopy in the terahertz frequency region. Complex optical constants of Si wafers with various carrier concentration were measured by the terahertz ellipsometry.

© 2003 Optical Society of America

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