We have designed and fabricated tunable photonic-bandgap microcavities in optical waveguides, with strain modulation via thin-film piezoelectric actuators on deformable membranes. Cavity resonance tunability, with nanometer lattice control, is designed through perturbation on FDTD computations. Device fabrication integrates X-ray nanolithography, piezoelectric micro-actuators and bulk micromachining.

© 2003 Optical Society of America

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