Abstract

Barium titanate (BTO) is a ferroelectric material that has important properties for optical, microwave, electrical and MEMS applications. One useful property of BTO is its large electro-optical coefficients, namely, r₅₁ of BTO is ~30 times larger than that of lithium niobate. This large coefficient promises low voltage operation of E-0 devices, such as TE/TM mode converter and modulators. Recently the authors have demonstrated novel approach to fabrication of BTO thin film by Crystal Ion Slicing (CIS) technology.¹ Single-crystal bulk BTO is successfully sliced into micron-thick films bonded on a glass substrate. Bonding is by anodic bonding, and integration onto semiconductor substrates, for example silicon, is possible.

© 2002 Optical Society of America