Abstract

High aluminum content Al_xGa_1−xAs is known to t>^e controllably oxidizable under elevated temperature in the presence of water vapor.¹ Oxidized Al_xGa_1−xAs exhibits properties that make them desirable for device applications, such as being highly selective on Al composition, electri- cally insulating and a low refractive index. For device designs such as distributed feedback (DFB) or distributed Bragg reflector (DBR) lasers, it’s very important to form an efficient broadband DBR grating. Typical DFB and DBR lasers have weak efficiency gratings due to small refractive lndex differences. As a result, a large number of gating pairs (greater than 1000) are required to generate a wider stopband in its reflectivity spectrum.

© 2002 Optical Society of America