Abstract
In the work described here, a MEMS DM having good optical quality was used for compensation of static aberrations in an optical system. The MEMS DM, manufactured by Boston Micromachines Corporation, is a 140 actuator, continuous silicon mirror. Its optoelectromechanical performance characteristics, which have been detailed elsewhere.1–3
© 2002 Optical Society of America
PDF ArticleMore Like This
Nathan Doble, Li Chen, Geun-Young Yoon, Paul Bierden, and Scot Olivier
CMN4 Conference on Lasers and Electro-Optics (CLEO:S&I) 2002
Tripurari. S. Kumar and Ravi. N. Banavar
MPo.21 International Conference on Fibre Optics and Photonics (Photonics) 2012
Michael A. Helmbrecht, Pamela F. Caton, Carl J. Kempf, Min He, and Franck Marchis
ATh1K.1 CLEO: Applications and Technology (CLEO:A&T) 2016