Abstract
Laser Doppler Vibrometer (LDV) has widen its application from heavy machinery, such as automobile, to small and delicate devices, such as CD player and MEMS devices for the measurement of vibration. However, it should be operated on the heavy and bulky vibration-isolated table since LDV’s body vibration deteriorates measured signal, which limits its usage. In this paper we report the development of a novel dual beam Laser Doppler Vibrometer (LDV) that can eliminate the perturbation due to the vibrometer body vibration. Since a residual laser beam from the beam splitter is used and decoupled from main laser beam and a least mean square adaptive algorithm1 is used to eliminate the perturbation due to the vibrometer body vibration, this dual beam LDV can be operated as an LDV with independent two object beam or an LDV with body vibration cancellation mechanism without any external reference surface.2
© 2002 Optical Society of America
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