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Optica Publishing Group
  • Conference on Lasers and Electro-Optics
  • OSA Technical Digest (Optica Publishing Group, 2001),
  • paper CWA30

Monitoring for Parts-Per-Billion Trace Gas impurity Contamination in Semiconductor Fab Process Gases

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Abstract

A major innovation in trace gas impurity contamination monitoring has led to the development of a complete analyzer system, the MTO- 1000, for continuous detection of ultra, low trace gas impurities in semiconductor process gases. The analyzer is based on infrared laser absorption spectroscopy.

© 2001 Optical Society of America

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