Sensitive Surface Cleaning by Means of an Excimer Laser Scanning Device

K.-H. Sleglich; H. Harde

Conference on Lasers and Electro-Optics
OSA Technical Digest (Optica Publishing Group, 2001),
paper CTuT7

Sensitive Surface Cleaning by Means of an Excimer Laser Scanning Device

K.-H. Sleglich and H. Harde

Conference on Lasers and Electro-Optics 2001

Baltimore, Maryland United States
6–10 May 2001
ISBN: 1-55752-662-1

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Laser Processing (CTuT)

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K. -. Sleglich and H. Harde, "Sensitive Surface Cleaning by Means of an Excimer Laser Scanning Device," in Conference on Lasers and Electro-Optics, J. Kafka, K. Vahala, R. Williamson, and A. Willner, eds., OSA Technical Digest (Optica Publishing Group, 2001), paper CTuT7.

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Abstract

In this contribution we present a device developed for cleaning of superficial adherent impurities by removal of only thin films of a surface layer.

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