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  • Conference on Lasers and Electro-Optics
  • OSA Technical Digest (Optica Publishing Group, 2001),
  • paper CThS5

Imaging the strain fields resulting from femtosecond laser micromachining of semiconductors

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Abstract

Laser-based processing with femtosecond light pulses has attracted considerable attention due to the qualitatively different light-matter interactions.

© 2001 Optical Society of America

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