Abstract
The fabrication of diffractive optical elements (DOE’s) using a combination of electron-beam lithography and replica molding is detailed. Previous work has shown that diffractive optical lenses can be successfully fabricated with subwavelength features.1–2 The challenge now is to fabricate a diversity of complex diffractive optical elements,3 and to develop replica molding as a technique for their rapid and effective production.
© 2001 Optical Society of America
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