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Optica Publishing Group
  • Conference on Lasers and Electro-Optics
  • OSA Technical Digest (Optica Publishing Group, 2000),
  • paper CTuF4

Densely packed pie-shaped vertical- cavity surface-emitting laser array incorporating a tapered one-dimensional wet oxidation

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Abstract

Owing to their geometric advantage with respect to mass production, WDM VCSEL arrays have drawn attention as a low cost means of increasing data transmission rate for short haul communications.1 Recently, pie-shaped WDM VCSEL arrays were successfully fabricated by means of anodic etching followed by regrowth.2 In addition to this work, wavelength tuning of VCSEL emission has been demonstrated via postgrowth oxidation/ in this paper, we present the results of applying postgrowth oxidation to the fabrication of mask-defined densely-packed WDM VCSEL arrays.

© 2000 Optical Society of America

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