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Optica Publishing Group
  • Conference on Lasers and Electro-Optics
  • OSA Technical Digest (Optica Publishing Group, 2000),
  • paper CThM72

Characterization of excimer lasers for application to lenslet array homogenizers

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Abstract

Lensiet homogenizers are often used to improve the uniformity of illumination in condenser systems for photolithography.

© 2000 Optical Society of America

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