Self-assembled micro-scanner fabricated by surface-micromachining technology

G.D. Su; M.C. Wu

Conference on Lasers and Electro-Optics
OSA Technical Digest (Optica Publishing Group, 1999),
paper CTuT2

Self-assembled micro-scanner fabricated by surface-micromachining technology

G.D. Su and M.C. Wu

Conference on Lasers and Electro-Optics 1999

Baltimore, Maryland United States
23–26 May 1999
ISBN: 1-55752-570-6

From the session
Optical Interconnects and Switching (CTuT)

Not Accessible

Your library or personal account may give you access

Get PDF
Email
Share
Get Citation
Copy Citation Text
G. D. Su and M. C. Wu, "Self-assembled micro-scanner fabricated by surface-micromachining technology," in Conference on Lasers and Electro-Optics, C. Chang-Hasnain, W. Knox, J. Kafka, and K. Vahala, eds., OSA Technical Digest (Optica Publishing Group, 1999), paper CTuT2.

Export Citation
- BibTex
- Endnote (RIS)
- HTML
- Plain Text
Save article

Abstract

Optical scanners are used in a wide variety of applications such as printing, quality inspection, confocal microscopy, data storage, precision pattern generation, display, and medical imaging.

PDF Article

More Like This

Out-of-plane vertical torsion mirror for optical scanner and chopper applications

G.D. Su, S.S. Lee, and M.C. Wu
CThAA1 Conference on Lasers and Electro-Optics (CLEO:S&I) 1998

Surface-Micromachined 2D Optical Scanners with High-Performance Single-Crystalline Silicon Micromirrors

Guo-Dung J. Su, Hung Nguyen, Pam Paterson, Hiroshi Toshiyoshi, and Ming C. Wu
PD21 Conference on Lasers and Electro-Optics (CLEO:S&I) 2000

Design and Fabrication of High-Performance Silicon Micromachined Resonant Microscanners for Optical Scanning Applications

Meng-Hsiung Kiang, Olav Solgaard, Richard S. Muller, and Kam Y. Lau
IWG3 Integrated Photonics Research (IPR) 1996

Previous Article Next Article