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  • Conference on Lasers and Electro-Optics
  • OSA Technical Digest (Optica Publishing Group, 1999),
  • paper CTuI3

Dark current reduction in InGaAs metal-semiconductor-metal photodetectors with Coplanar waveguide transmission lines

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Abstract

InGaAs metal-semiconductor-metal (MSM) photodetectors are one of the promising devices for 1.55 µm lightwave communication systems because of their high-speed performance derived from the low capacitance per unit area.

© 1999 Optical Society of America

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