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Conferences > CLEO > 1999 > CTuC > CTuC6
  • Conference on Lasers and Electro-Optics
  • OSA Technical Digest (Optica Publishing Group, 1999),
  • paper CTuC6

Near-field scanning optical microscopy probe fabrication using focused ion beam milling technique

Saeed Pilevar, Klaus Edinger, Walid Atia, Igor Smolynianov, and Christopher Davis

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Abstract

In this work we have developed a method for fabricating clean, well-defined, and highly reproducible subwavelength apertures for near-field scanning optical microscopy1 (NSOM) applications using a focused ton beam (FIB) milling technique.

© 1999 Optical Society of America

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