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Conferences > CLEO > 1999 > CThN > CThN3
  • Conference on Lasers and Electro-Optics
  • OSA Technical Digest (Optica Publishing Group, 1999),
  • paper CThN3

In-situ second harmonic spectroscopic study of surface vs. bulk boron-doping of Si(001)

D. Lim, J. G. Ekerdt, and M. C. Downer

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Abstract

In-situ doping of semiconductor films by chemical vapor deposition (CVD) permits precise tailoring of dopant profiles with less surface damage than ion implantation.

© 1999 Optical Society of America

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