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  • Conference on Lasers and Electro-Optics
  • OSA Technical Digest (Optica Publishing Group, 1999),
  • paper CFF4

Lift-off and rapid processing of 10μm-thick single-crystal LiNbO3 films

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Abstract

The recent development of a novel crystal ion slicing technique (CIS)1 has made it possible to obtain high-quality single-crystal LiNbO3 micron-thick films for heterogeneous integration of optical systems.

© 1999 Optical Society of America

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