Micro-scale tree surface rapid prototyping

Xiang Zhang; Xiaoning Jiang; Cheng Sun; Andrew C. Tam; Andrew C. Tam

Conference on Lasers and Electro-Optics
OSA Technical Digest (Optica Publishing Group, 1999),
paper CFC3

Micro-scale tree surface rapid prototyping

Xiang Zhang, Xiaoning Jiang, Cheng Sun, and Andrew C. Tam

Conference on Lasers and Electro-Optics 1999

Baltimore, Maryland United States
23–26 May 1999
ISBN: 1-55752-570-6

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Microfabrication (CFC)

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X. Zhang, X. Jiang, C. Sun, and A. C. Tam, "Micro-scale tree surface rapid prototyping," in Conference on Lasers and Electro-Optics, C. Chang-Hasnain, W. Knox, J. Kafka, and K. Vahala, eds., OSA Technical Digest (Optica Publishing Group, 1999), paper CFC3.

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Abstract

IC-based micromachining processes used to fabricate MEMS devices have certain limitations.

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