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Conferences > CLEO > 1998 > LTuA > LTuA2
  • Conference on Lasers and Electro-Optics
  • (Optica Publishing Group, 1998),
  • paper LTuA2

X-ray lithography: overview and outlook

Jerome P. Silverman

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Abstract

In the fabrication of integrated circuits, the lithographic definition of the circuit patterns is one of the most critical steps.

© 1998 Optical Society of America

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